Publication:
Correlated effects of fluorine and hydrogen in fluorinated tin oxide (FTO) transparent electrodes deposited by sputtering at room temperature

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dc.affiliation.dptoUC3M. Departamento de Físicaes
dc.affiliation.grupoinvUC3M. Grupo de Investigación: Materiales avanzados para aplicaciones en energía solares
dc.contributor.authorMorán Pedroso, María
dc.contributor.authorGago Fernández, Raúl
dc.contributor.authorJulin, Jaakko
dc.contributor.authorSalas Colera, Eduardo
dc.contributor.authorJiménez, Ignacio
dc.contributor.authorDe Andrés, Alicia
dc.contributor.authorPrieto de Castro, Carlos Andrés
dc.contributor.funderMinisterio de Economía y Competitividad (España)es
dc.date.accessioned2022-11-03T09:37:57Z
dc.date.available2023-01-30T00:00:06Z
dc.date.issued2021-01-30
dc.description.abstractThe optical and electrical properties of fluorinated tin oxide (FTO) films deposited at room temperature by sputtering have been investigated varying the fluorine content and the hydrogen atmosphere. The complex behavior of the obtained films is disclosed using a wide set of characterization techniques that reveals the combined effects of these two parameters on the generated defects. These defects control the electrical transport (carrier density, mobility and conductivity), the optical properties (band gap and defects-related absorption and photoluminescence) and finally promote the amorphization of the samples. H2 in the sputtering gas does not modify the H content in the films but induces the partial reduction of tin (from Sn4 to Sn2) and the consequent generation of oxygen vacancies with shallow energy levels close to the valence band. A variation of up to four orders of magnitude in electrical conductivity is reported in samples with the appropriate fluorine doping and hydrogen fraction in the sputtering gas, maintaining excellent optical transparency. Optimized room temperature grown electrodes reach sheet resistance ~20 Omega and transparency 90%. This room temperature deposition process enables film preparation on flexible organic substrates, such as polyethylene terephthalate (PET), with identical performance of doubtless interest in flexible and large scale electronics.en
dc.description.sponsorshipWe would like to thank IDIVAL for financial support, Projects N°NVAL16/17, INNVAL19/18 and NVAL18/07. CRL thanks the MINECO for the Juan de la Cierva Formación grant (ref. FJCI-2015-25306). This work has been supported by the Spanish MINECO, Instituto de Salud Carlos III, the European Union FEDER funds under Projects ref. PI16/00496 (AES 2016), PI19/00349 and DTS19/00033 (AES 2019). The authors are grateful to Dr F Madrazo and the Laser Microscopy Unit of the IDIVAL Institute for the use of the Confocal Raman Imaging Microscope.en
dc.format.extent7
dc.identifier.bibliographicCitationMorán-Pedroso, M., Gago, R., Julin, J., Salas-Colera, E., Jimenez, I., de Andrés, A. & Prieto, C. (2021). Correlated effects of fluorine and hydrogen in fluorinated tin oxide (FTO) transparent electrodes deposited by sputtering at room temperature. Applied Surface Science, 537, 147906.en
dc.identifier.doi10.1016/j.apsusc.2020.147906
dc.identifier.issn0169-4332
dc.identifier.publicationfirstpage1
dc.identifier.publicationlastpage7
dc.identifier.publicationtitleApplied Surface Scienceen
dc.identifier.publicationvolume537
dc.identifier.urihttps://hdl.handle.net/10016/35960
dc.identifier.uxxiAR/0000026982
dc.language.isoeng
dc.publisherElsevieren
dc.relation.projectIDGobierno de España. FJCI-2015-25306es
dc.rights© 2020 Elsevier B.V. All rights reserved.en
dc.rightsAtribución-NoComercial-SinDerivadas 3.0 España*
dc.rights.accessRightsopen accessen
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/*
dc.subject.ecienciaQuímicaes
dc.subject.otherTransparent conductive materialsen
dc.subject.otherFluorinated tin oxideen
dc.subject.otherRoom temperature film preparationen
dc.titleCorrelated effects of fluorine and hydrogen in fluorinated tin oxide (FTO) transparent electrodes deposited by sputtering at room temperatureen
dc.typeresearch article*
dc.type.hasVersionAM*
dspace.entity.typePublication
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