Publication:
An Unbiased MEMS Capacitance-Controlled Oscillator as a Microphone for HMI Applications

dc.affiliation.dptoUC3M. Departamento de Tecnología Electrónicaes
dc.affiliation.grupoinvUC3M. Grupo de Investigación: Diseño Microelectrónico y Aplicaciones (DMA)es
dc.contributor.authorNoviello, Michele
dc.contributor.authorQuintero Alonso, Andrés
dc.contributor.authorPatón Álvarez, Susana
dc.contributor.funderEuropean Commissiones
dc.date.accessioned2023-03-09T17:45:32Z
dc.date.available2023-03-09T17:45:32Z
dc.date.issued2022-11-15
dc.descriptionProceeding of AUSTROCHIP 2022: 30th Austrian Workshop on Microelectronics, October 11th, Villach, Austria.en
dc.description.abstractMEMS microphones are usually DC biased with a voltage exceeding 10V and a large resistance, requiring a charge pump and a high-ohmic link between the ASIC and the MEMS. This DC biasing is needed to obtain enough sensitivity for medium to high quality microphones. This manuscript inves-tigates capacitance-controlled oscillators which allow to directly connect the MEMS sensor to the oscillator; this solution is prone to scaling. A new type of configuration (referred to as Cross-Connected Sensor) is presented and discussed. Its main advantage is the increase in the sensitivity and, when integrated in an ADC architecture, in the achievable SNR. The proposed solution is intended for Human-Machine Interface applications given their moderate SNR requirements.en
dc.description.sponsorshipThis project has received funding from the European Union’s Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement No 956601.en
dc.description.statusPublicadoes
dc.format.extent4
dc.identifier.bibliographicCitationAUSTROCHIP 2022: 30th Austrian Workshop on Microelectronics, October 11th, Villach, Austria [proceedings]. IEEE, cop. 2022. Pp. 57-60.en
dc.identifier.doihttps://doi.org/10.1109/Austrochip56145.2022.9940675
dc.identifier.isbn978-1-6654-7309-5
dc.identifier.publicationfirstpage57
dc.identifier.publicationlastpage60
dc.identifier.publicationtitleAUSTROCHIP 2022: 30th Austrian Workshop on Microelectronics, October 11th, Villach, Austria.en
dc.identifier.urihttps://hdl.handle.net/10016/36801
dc.identifier.uxxiCC/0000033940
dc.language.isoengen
dc.publisherIEEEen
dc.relation.eventdate2022-11-11
dc.relation.eventnumber30
dc.relation.eventplaceVillach (AUSTRIA)en
dc.relation.eventtitleAustrochip Workshop on Microelectronicsen
dc.relation.projectIDinfo:eu-repo/grantAgreement/EC/H2020/956601es
dc.rights©2022 IEEE.en
dc.rights.accessRightsopen accessen
dc.subject.ecienciaElectrónicaes
dc.subject.otherMicromechanical devicesen
dc.subject.otherSemiconductor device modelingen
dc.subject.otherResistanceen
dc.subject.otherSensitivityen
dc.subject.otherPower demanden
dc.subject.otherVoltageen
dc.subject.otherCapacitanceen
dc.subject.otherADCen
dc.subject.otherVoltage-controlled oscillatorsen
dc.subject.otherMEMS microphoneen
dc.subject.otherHMIen
dc.subject.otherTime-encodingen
dc.titleAn Unbiased MEMS Capacitance-Controlled Oscillator as a Microphone for HMI Applicationsen
dc.typeconference paper*
dc.type.hasVersionAM*
dspace.entity.typePublication
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