Publication:
Surface nanopatterning by ion beam irradiation: compositional effects

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dc.affiliation.dptoUC3M. Departamento de Matemáticases
dc.affiliation.grupoinvUC3M. Grupo de Investigación: Interdisciplinar de Sistemas Complejos (GISC)es
dc.contributor.authorVázquez, L.
dc.contributor.authorRedondo-Cubero, A.
dc.contributor.authorLorenz, K.
dc.contributor.authorPalomares, F. J.
dc.contributor.authorCuerno Rejado, Rodolfo
dc.contributor.funderComunidad de Madrides
dc.contributor.funderMinisterio de Economía y Competitividad (España)es
dc.contributor.funderUniversidad Carlos III de Madrides
dc.date.accessioned2023-02-07T12:43:06Z
dc.date.available2023-02-07T12:43:06Z
dc.date.issued2022-08-17
dc.description.abstractSurface nanopatterning induced by ion beam irradiation (IBI) has emerged as an effective nanostructuring technique since it induces patterns on large areas of a wide variety of materials, in short time, and at low cost. Nowadays, two main subfields can be distinguished within IBI nanopatterning depending on the irrelevant or relevant role played by the surface composition. In this review, we give an up-dated account of the progress reached when surface composition plays a relevant role, with a main focus on IBI surface patterning with simultaneous co-deposition of foreign atoms. In addition, we also review the advances in IBI of compound surfaces as well as IBI systems where the ion employed is not a noble gas species. In particular, for the IBI with concurrent metal co-deposition, we detail the chronological evolution of these studies because it helps us to clarify some contradictory early reports. We describe the main patterns obtained with this technique as a function of the foreign atom deposition pathway, also focusing in those systematic studies that have contributed to identify the main mechanisms leading to the surface pattern formation and development. Likewise, we explain the main theoretical models aimed at describing these nanopattern formation processes. Finally, we address two main special features of the patterns induced by this technique, namely, the enhanced pattern ordering and the possibility to produce both morphological and chemical patterns.en
dc.description.sponsorshipThis work was supported by Ministerio de Economía, Industria y Competitividad (MINECO, Spain), Agencia Estatal de Investigación (AEI, Spain), and Fondo Europeo de Desarrollo Regional (FEDER, EU) through Grant No. PGC2018-094763-B-I00, and by Comunidad de Madrid (Spain) under the Multiannual Agreement with UC3M in the line of Excellence of University Professors, No. EPUC3M23, in the context of the V Plan Regional de Investigación Científica e Innovación Tecnológica (PRICIT), as well as under the TRANSNANOAVANSENS program (S2018-NMT-4349).en
dc.identifier.bibliographicCitationVázquez, L., Redondo-Cubero, A., Lorenz, K., Palomares, F. J. & Cuerno, R. (2022). Surface nanopatterning by ion beam irradiation: compositional effects. Journal of Physics: Condensed Matter, 34(33), 333002en
dc.identifier.doihttps://doi.org/10.1088/1361-648X/ac75a1
dc.identifier.issn0953-8984
dc.identifier.publicationfirstpage333002-1
dc.identifier.publicationissue33
dc.identifier.publicationlastpage333002-33
dc.identifier.publicationtitleJournal of Physics: Condensed Matteren
dc.identifier.publicationvolume34
dc.identifier.urihttps://hdl.handle.net/10016/36504
dc.identifier.uxxiAR/0000031074
dc.language.isoeng
dc.publisherIOP Scienceen
dc.relation.projectIDGobierno de España. PGC2018-094763-B-I00es
dc.relation.projectIDComunidad de Madrid. EPUC3M23es
dc.rights© 2022 The Author(s).en
dc.rightsAtribución 3.0 España*
dc.rights.accessRightsopen accessen
dc.rights.urihttp://creativecommons.org/licenses/by/3.0/es/*
dc.subject.ecienciaEstadísticaes
dc.subject.ecienciaFísicaes
dc.subject.ecienciaMatemáticases
dc.subject.otherSurface nanopatterningen
dc.subject.otherIon beam sputteringen
dc.subject.otherChemical effectsen
dc.subject.otherCo-depositionen
dc.subject.otherRippleen
dc.subject.otherDoten
dc.subject.otherSilicidesen
dc.titleSurface nanopatterning by ion beam irradiation: compositional effectsen
dc.typeresearch article*
dc.type.hasVersionVoR*
dspace.entity.typePublication
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