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LTCC microflow analyzers with monolithic integration of thermal control

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dc.affiliation.dptoUC3M. Departamento de Ciencia e Ingeniería de Materiales e Ingeniería Químicaes
dc.affiliation.grupoinvUC3M. Grupo de Investigación: Síntesis y Procesado de Materialeses
dc.contributor.authorMartínez Cisneros, Cynthia Susana
dc.contributor.authorIbáñez-García, Núria
dc.contributor.authorValdés, Francisco
dc.contributor.authorAlonso, Julián
dc.date.accessioned2022-02-02T12:57:30Z
dc.date.available2022-02-02T12:57:30Z
dc.date.issued2007-07-20
dc.description.abstractRecently, the low temperature co-fired ceramics technology has shown to be an excellent alternative to silicon-based microfabrication techniques for the production of three-dimensional structures using a multi-layer approach. This enables the integration of several unitary operations of a classical analytical process and also the integration of sensors, actuators and electronics in the same substrate. In this work, we show the integration of the actuators and the sensors needed for the control of temperature inside a miniaturized fluidic device. The proposed device presents enough thermal accuracy to be used in chemical systems where temperature control is a crucial factor, such as enzyme reactions or polymerase chain reaction systems.en
dc.description.sponsorshipThe authors would like to thank the Spanish MEC for its financial support through: Consolider-Ingenio 2010 (CSD2006-00012), TEC2006-13907-C04-04/MIC and CIT-310200-2007-29. CSM is also thankful to the Alban Program (High-level grants from the European Union to Latin America for its financial support (Grant number: E05D053315MX).en
dc.format.extent8
dc.identifier.bibliographicCitationMartínez-Cisneros, C. S., Ibáñez-García, N., Valdés, F. & Alonso, J. (2007). LTCC microflow analyzers with monolithic integration of thermal control. Sensors and Actuators A: Physical, 138(1), 63–70.en
dc.identifier.doihttps://doi.org/10.1016/j.sna.2007.04.059
dc.identifier.issn0924-4247
dc.identifier.publicationfirstpage63
dc.identifier.publicationissue1
dc.identifier.publicationlastpage70
dc.identifier.publicationtitleSensors and Actuators A: Physicalen
dc.identifier.publicationvolume138
dc.identifier.urihttps://hdl.handle.net/10016/34017
dc.identifier.uxxiAR/0000021092
dc.language.isoengen
dc.publisherElsevieren
dc.rights© 2007 Elsevier B.V. All rights reserved.en
dc.rightsAtribución-NoComercial-SinDerivadas 3.0 España*
dc.rights.accessRightsopen accessen
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/*
dc.subject.ecienciaMaterialeses
dc.subject.ecienciaQuímicaes
dc.subject.otherLTCCen
dc.subject.otherElectronicsen
dc.subject.otherFluidicsen
dc.subject.otherTemperature controlen
dc.subject.otherMiniaturizationen
dc.titleLTCC microflow analyzers with monolithic integration of thermal controlen
dc.typeresearch article*
dc.type.hasVersionAM*
dspace.entity.typePublication
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