Pérez Díaz, José LuisValiente Blanco, IgnacioDíez Jiménez, EfrénSanchez Garcia-Casarrubios, Juan2024-02-022024-02-022014-04-01J. L. Perez-Diaz, I. Valiente-Blanco, E. Diez-Jimenez and J. Sanchez-Garcia-Casarrubios, "Superconducting Noncontact Device for Precision Positioning in Cryogenic Environments," in IEEE/ASME Transactions on Mechatronics, vol. 19, no. 2, pp. 598-605, April 2014, doi: 10.1109/TMECH.2013.2250988.1083-4435https://hdl.handle.net/10016/39794Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.In this paper, a noncontact linear positioner based on superconducting magnetic levitation for high-precision positioning has been tested under cryogenic conditions (similar to 20 K and similar to 10(-6) Pa). The prototype is able to achieve submicrometric positioning resolution of 230 +/- 30 nm RMS along a stroke of +/- 9 mm length with a current resolution of 15 mu A, and a peak current requirement lower than +/- 500 mA. In addition, it was demonstrated that an open-loop control strategy could be used for positioning the moving part with the accuracy of the order of 1 mu m. On the other hand, deviations of the slider position were found to be +/- 650 mu rad for the pitch, lower than 100 mu rad for the yaw, +/- 2000 mu rad for the roll, and +/- 4 mu m for the lateral run, all of them related to a full stroke motion. These results reveal a good performance of the device and demonstrate the potential of a new tool for applications, where high-precision positioning is required within a long range in cryogenic environments like far-infrared interferometry.8eng© 2014, IEEECryogenicsInterferometryLevitationSubmicrometric positioningSuperconducting deviceMagnetic-levitationMotion controlPiezoelectric actuatorStageDesignSystemresearch articleIngeniería Mecánicahttps://doi.org/10.1109/TMECH.2013.2250988open access5982605IEEE/ASME Transactions on Mechatronics19AR/0000014730