RT Journal Article
T1 Influence of collision cascade statistics on pattern formation of ion-sputtered surfaces
A1 Feix, M.
A1 Hartmann, A. K.
A1 Kree, R.
A1 Muñoz-García, Javier
A1 Cuerno, Rodolfo
AB Theoretical continuum models that describe the formation of patterns on surfaces of targets undergoing ion-beam sputtering are based on Sigmund’s formula, which describes the spatial distribution of the energy deposited by the ion. For small angles of incidence and amorphous or polycrystalline materials, this description seems to be suitable, and leads to the classic Bradley and Harper (BH) morphological theory [R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)]. Here we study the sputtering of Cu crystals by means of numerical simulations under the binary-collision approximation. We observe significant deviations from Sigmund’s energy distribution. In particular, the distribution that best fits our simulations has a minimum near the position where the ion penetrates the surface, and the decay of energy deposition with distance to ion trajectory is exponential rather than Gaussian. We provide a modified continuum theory which takes these effects into account and explores the implications of the modified energy distribution for the surface morphology. In marked contrast with BH’s theory, the dependence of the sputtering yield with the angle of incidence is nonmonotonous, with a maximum for nongrazing incidence angles.
PB The American Physical Society
SN 1098-0121 (Print)
SN 1550-235x (Online)
YR 2005
FD 2005-03-15
LK https://hdl.handle.net/10016/6912
UL https://hdl.handle.net/10016/6912
LA eng
NO 14 pages, 14 figures.-- PACS nrs.: 68.35.−p, 05.10.−a, 79.20.−m.-- ArXiv pre-print available at: http://arxiv.org/abs/cond-mat/0407245
NO Final publisher version available Open Access at: http://gisc.uc3m.es/~cuerno/publ_list.html
NO This work was supported by the Sonderforschungsbereich 602 of the Deutsche Forschungsgemeinschaft and by MECD (Spain) under Grant No. BFM2003-07749-C05-01. A.K.H. obtained financial support from the Volkswagen Stiftung (Germany) within the program "Nachwuchsgruppen an Universitäten". A.K.H. thanks K. P. Lieb for helpful suggestions. J.M.-G. acknowledges support from MECD (Spain) through an FPU fellowship.
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