RT Journal Article T1 Tripling the light extraction efficiency of a deep ultraviolet LED using a nanostructured p-contact A1 López Fraguas, Eduardo A1 Binkowski, Felix A1 Burger, Sven A1 Hagedorn, Sylvia A1 García Cámara, Braulio A1 Vergaz Benito, Ricardo A1 Becker, Christiane A1 Manley, Phillip AB Despite a wide array of applications, deep ultra-violet light emitting diodes offer relatively poor efficiencies compared to their optical counterparts. A contributing factor is the lower light extraction efficiency due to both highly absorbing p-contacts and total internal reflection. Here, we propose a structure consisting of a hexagonal periodic array of cylindrical nanoholes in the multi-layered p-contact which are filled with platinum. This nanostructure reduces the absorption of the p-contact layer, leading to a higher emission into the n-contact compared to a planar reference. An optimum geometry of the nanostructure allows a light extraction efficiency of 15.0%, much higher than the typical 4.6% of a planar reference. While the nanostructure strongly decreases the light absorption in the p-contact, it is still not able to considerably reduce the total internal reflection. Consequently, the nanostructured p-contact should be combined with other optical strategies, such as nanopatterned sapphire substrates to increase the efficiency even further. Despite this, the nanostructure described in this work provides a readily realizable path to enhancing the light extraction efficiency of state-of-the-art deep ultra-violet light emitting diodes. PB Nature Research SN 2045-2322 YR 2022 FD 2022-07-07 LK https://hdl.handle.net/10016/36579 UL https://hdl.handle.net/10016/36579 LA eng NO The authors thank the Project PID2019-109072RB-C31 funded by MCIN/AEI/10.13039/501100011033. DS e-Archivo RD 4 may. 2024