RT Journal Article T1 LTCC microflow analyzers with monolithic integration of thermal control A1 Martínez Cisneros, Cynthia Susana A1 Ibáñez-García, Núria A1 Valdés, Francisco A1 Alonso, Julián AB Recently, the low temperature co-fired ceramics technology has shown to be an excellent alternative to silicon-based microfabrication techniques for the production of three-dimensional structures using a multi-layer approach. This enables the integration of several unitary operations of a classical analytical process and also the integration of sensors, actuators and electronics in the same substrate. In this work, we show the integration of the actuators and the sensors needed for the control of temperature inside a miniaturized fluidic device. The proposed device presents enough thermal accuracy to be used in chemical systems where temperature control is a crucial factor, such as enzyme reactions or polymerase chain reaction systems. PB Elsevier SN 0924-4247 YR 2007 FD 2007-07-20 LK https://hdl.handle.net/10016/34017 UL https://hdl.handle.net/10016/34017 LA eng NO The authors would like to thank the Spanish MEC for its financial support through: Consolider-Ingenio 2010 (CSD2006-00012), TEC2006-13907-C04-04/MIC and CIT-310200-2007-29. CSM is also thankful to the Alban Program (High-level grants from the European Union to Latin America for its financial support (Grant number: E05D053315MX). DS e-Archivo RD 1 sept. 2024