RT Journal Article
T1 Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation
A1 García, G.
A1 Martín, M.
A1 Ynsa, M. D.
A1 Torres-Costa, V.
A1 Crespillo, M. L.
A1 Tardío López, Miguel Modesto
A1 Olivares, J.
A1 Bosia, F.
A1 Peña-Rodríguez, O.
A1 Nicolas, J.
A1 Tallarida, M.
AB This paper describes in detail a novel manufacturing process for optical gratings suitable for use in the UV and soft X-ray regimes in a single-crystal diamond substrate based on highly focused swift heavy-ion irradiation. This type of grating is extensively used in light source facilities such as synchrotrons or free electron lasers, with ever-increasing demands in terms of thermal loads, depending on beamline operational parameters and architecture. The process proposed in this paper may be a future alternative to current manufacturing techniques, providing the advantage of being applicable to single-crystal diamond substrates, with their unique properties in terms of heat conductivity and radiation hardness. The paper summarizes the physical principle used for the grating patterns produced by swift heavy-ion irradiation and provides full details for the manufacturing process for a specific grating configuration, inspired in one of the beamlines at the ALBA synchrotron light source, while stressing the most challenging points for a potential implementation. Preliminary proof-of-concept experimental results are presented, showing the practical implementation of the methodology proposed herein.
PB Springer
SN 2190-5444
YR 2022
FD 2022-10
LK https://hdl.handle.net/10016/37169
UL https://hdl.handle.net/10016/37169
LA eng
NO The authors acknowledge funding support by the following projects: PID2020-112770RB-C22 from the Spanish Ministry of Science and Innovation, TechnoFusión (III)-CM (S2018/EMT-4437) from Comunidad de Madrid (cofinanced by ERDF and ESF), agreement between Community of Madrid and Universidad Autónoma de Madrid (item "Excellence of University Professorate"). M.L.C. acknowledges financial support from the research project "Captacion de Talento UAM" Ref: #541D300 supervised by the Vice-Chancellor of Research of Universidad Autónoma de Madrid (UAM). LOREA beamline at ALBA is a project co-funded by the European Regional Development Fund (ERDF) within the Framework of the Smart Growth Operative Programme 2014-2020. The authors acknowledge the support from The Centro de Microanálisis de Materiales (CMAM)-Universidad Autónoma de Madrid, for the beam time proposal (demonstration of a grating profile for soft X-rays in diamond via ion lithography) with code IuB-005/21, and its technical staff for their contribution to the operation of the accelerator. We also acknowledge P. Olivero for very useful comments on the manuscript draft.Open Access funding provided thanks to the CRUE-CSIC agreement with Springer Nature.
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RD 12 may. 2024