RT Journal Article
T1 Self-organized nanopattrening of silicon surfaces by ion beam sputtering
A1 Muñoz-García, Javier
A1 Vázquez Burgos, Luis
A1 Cañadas Castro, Mario
A1 Gago, Raúl
A1 Redondo-Cubero, Andrés
A1 Moreno-Barrado, Ana
A1 Cuerno, Rodolfo
AB In recent years Ion Beam Sputtering (IBS) has revealed itself as a powerful technique to induce surface nanopatterns with a large number of potential applications. These structures are produced in rather short processing times and over relatively large areas, for a wide range of materials, such as metals, insulators, and semiconductors. In particular, silicon has become a paradigmatic system due to its technological relevance, as well as to its mono-elemental nature, wide availability, and production with extreme flatness. Thus, this review focuses on the IBS nanopatterning of silicon surfaces from the experimental and the theoretical points of view. First, the main experimental results and applications are described under the light of the recently established evidence on the key role played by simultaneous impurity incorporation during irradiation, which has opened a new scenario for an improved understanding of the phenomenon. Second, the progress and state-of-art of the theoretical descriptions of the IBS nanopatterning process for this type of targets are discussed. We summarize the historical approach to IBS through simulation techniques, with an emphasis on recent information from Molecular Dynamics methods, and provide a brief overview of the earlier and most recent continuum models for pure and compound systems.
PB Elsevier
SN 0927-796X
YR 2014
FD 2014-12
LK http://hdl.handle.net/10016/22125
UL http://hdl.handle.net/10016/22125
LA eng
NO This work has been partially supported by the Spanish Ministries of Science and Innovation (grants Nos. FIS2009-12964-C05-01, FIS2009-12964-C05-03, FIS2009-12964-C05-04, and BES-2010-036179) and of Economy and Competitiveness (grants Nos. FIS2012-38866-C05-01 and FIS2012-38866-C05-05, FIS2012-32349 and FIS2013-47949-C2-2). A.R.C. also acknowledges funding from SFRH/BPD/74095/2010 (Portugal) and from Juan de la Cierva program (Spain) under contract No. JCI-2012-14509.
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RD 30 abr. 2024