Order improvement of surface nanopatterns via substrate rocking under ion bombardment: Experiments and nonlinear models

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dc.contributor.author Jo, Sujin
dc.contributor.author Jun, Jihee
dc.contributor.author Lee, Eunsu
dc.contributor.author Yoon, S. M.
dc.contributor.author Seo, J.
dc.contributor.author Muñoz-García, Javier
dc.contributor.author Cuerno, Rodolfo
dc.contributor.author Kim, J. S.
dc.date.accessioned 2021-02-19T09:28:48Z
dc.date.available 2021-02-19T09:28:48Z
dc.date.issued 2020-01-21
dc.identifier.bibliographicCitation Jo, S., Jun, J., Lee, E., Yoon, S.M., Seo, J., Muñoz García, J., Cuerno, R. y Kim, J.S. (2020). Order improvement of surface nanopatterns via substrate rocking under ion bombardment: Experiments and nonlinear models. Physical Review B, 102(4), 045421.
dc.identifier.issn 2469-9950
dc.identifier.uri http://hdl.handle.net/10016/31965
dc.description.abstract Surface nanopatterns formed by ion beam sputtering (IBS) frequently include a high density of structural defects, which seriously limit their practical applications. Recent theoretical work [M. P. Harrison and R. M. Bradley, Phys. Rev. E 93, 040802(R) (2016)], based on the anisotropic Kuramoto-Sivashinsky (aKS) equation, proposes that rocking a substrate during IBS can produce defect-free patterns under certain requirements. We find experimentally, via low-energy Kr+ irradiation of Si and amorphous carbon targets, that rocking the substrates generally improves the order of the ripple patterns. Indeed, order is improved even when conditions required in the aKS model may not be satisfied. Through numerical simulations, we show that a suitable generalization of this equation, in which conserved nonlinear effects are incorporated, reproduces satisfactorily the pattern order in our experimental conditions.
dc.description.sponsorship J.-S.K. appreciates stimulating discussion and comments by M. Harrison and R. M. Bradley. We also thank H. B. Lee and M. W. Moon for providing a-C samples. This work is supported by Korean Research Foundation though Grants No. NRF-2016R1D1A1B03930532 and No. NRF-2019R1F1A1040955, and by Ministerio de Economía y Competitividad, Agencia Estatal de Investigación, and Fondo Europeo de Desarrollo Regional (Spain and European Union) through Grants No. FIS2015-73337-JIN, No. FIS2015-66020-C2-1-P, and No. PGC2018-094763-B-I00.
dc.format.extent 13
dc.language.iso eng
dc.publisher American Physical Society
dc.rights © 2020 American Physical Society.
dc.title Order improvement of surface nanopatterns via substrate rocking under ion bombardment: Experiments and nonlinear models
dc.type article
dc.subject.eciencia Matemáticas
dc.identifier.doi https://doi.org/10.1103/PhysRevB.102.045421
dc.rights.accessRights openAccess
dc.relation.projectID Gobierno de España. FIS2015-73337-JIN
dc.relation.projectID Gobierno de España. FIS2015-66020-C2-1-P
dc.relation.projectID Gobierno de España. PGC2018-094763-B-I00
dc.type.version publishedVersion
dc.identifier.publicationissue 4
dc.identifier.publicationtitle Physical Review B
dc.identifier.publicationvolume 102
dc.identifier.uxxi AR/0000026472
dc.contributor.funder Ministerio de Economía y Competitividad (España)
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