Publication: Transients due to instabilities hinder Kardar-Parisi-Zhang scaling: a unified derivation for surface growth by electrochemical and chemical vapor deposition
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ISSN: 0031-9007 (Print)
ISSN: 1079-7114 (Online)
Publication date
2001-12-03
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The American Physical Society
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Abstract
We propose a unified moving boundary problem for surface growth by electrochemical and chemical vapor deposition, which is derived from constitutive equations into which stochastic forces are incorporated. We compute the coefficients in the interface equation of motion as functions of phenomenological parameters. The equation features the Kardar-Parisi-Zhang (KPZ) nonlinearity and instabilities which, depending on surface kinetics, can hinder the asymptotic KPZ scaling. Our results account for the universality and the experimental scarcity of KPZ scaling in the growth processes considered.
Description
4 pages, no figures.-- PACS nrs.: 68.35.Ct, 64.60.Ht, 81.15.Gh, 81.15.Pq.
Keywords
[PACS] Interface structure and roughness, [PACS] Dynamic critical phenomena, [PACS] Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.), [PACS] Electrodeposition, electroplating
Bibliographic citation
Physical Review Letters 87, 236103 (2001)