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Influence of collision cascade statistics on pattern formation of ion-sputtered surfaces

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dc.affiliation.dptoUC3M. Departamento de Matemáticases
dc.affiliation.grupoinvUC3M. Grupo de Investigación: Interdisciplinar de Sistemas Complejos (GISC)es
dc.contributor.authorFeix, M.
dc.contributor.authorHartmann, A. K.
dc.contributor.authorKree, R.
dc.contributor.authorMuñoz-García, Javier
dc.contributor.authorCuerno, Rodolfo
dc.date.accessioned2010-02-18T08:39:43Z
dc.date.available2010-02-18T08:39:43Z
dc.date.issued2005-03-15
dc.description14 pages, 14 figures.-- PACS nrs.: 68.35.−p, 05.10.−a, 79.20.−m.-- ArXiv pre-print available at: http://arxiv.org/abs/cond-mat/0407245
dc.descriptionFinal publisher version available Open Access at: http://gisc.uc3m.es/~cuerno/publ_list.html
dc.description.abstractTheoretical continuum models that describe the formation of patterns on surfaces of targets undergoing ion-beam sputtering are based on Sigmund’s formula, which describes the spatial distribution of the energy deposited by the ion. For small angles of incidence and amorphous or polycrystalline materials, this description seems to be suitable, and leads to the classic Bradley and Harper (BH) morphological theory [R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)]. Here we study the sputtering of Cu crystals by means of numerical simulations under the binary-collision approximation. We observe significant deviations from Sigmund’s energy distribution. In particular, the distribution that best fits our simulations has a minimum near the position where the ion penetrates the surface, and the decay of energy deposition with distance to ion trajectory is exponential rather than Gaussian. We provide a modified continuum theory which takes these effects into account and explores the implications of the modified energy distribution for the surface morphology. In marked contrast with BH’s theory, the dependence of the sputtering yield with the angle of incidence is nonmonotonous, with a maximum for nongrazing incidence angles.
dc.description.sponsorshipThis work was supported by the Sonderforschungsbereich 602 of the Deutsche Forschungsgemeinschaft and by MECD (Spain) under Grant No. BFM2003-07749-C05-01. A.K.H. obtained financial support from the Volkswagen Stiftung (Germany) within the program "Nachwuchsgruppen an Universitäten". A.K.H. thanks K. P. Lieb for helpful suggestions. J.M.-G. acknowledges support from MECD (Spain) through an FPU fellowship.
dc.description.statusPublicado
dc.format.mimetypeapplication/pdf
dc.identifier.bibliographicCitationPhysical Review B 71, 125407 (2005)
dc.identifier.doihttps://www.doi.org/10.1103/PhysRevB.71.125407
dc.identifier.issn1098-0121 (Print)
dc.identifier.issn1550-235x (Online)
dc.identifier.urihttps://hdl.handle.net/10016/6912
dc.language.isoeng
dc.publisherThe American Physical Society
dc.relation.publisherversionhttp://dx.doi.org/10.1103/PhysRevB.71.125407
dc.rights© The American Physical Society
dc.rights.accessRightsopen access
dc.subject.ecienciaMatemáticas
dc.subject.other[PACS] Solid surfaces and solid-solid interfaces: structure and energetics
dc.subject.other[PACS] Computational methods in statistical physics and nonlinear dynamics
dc.subject.other[PACS] Impact phenomena (including electron spectra and sputtering)
dc.titleInfluence of collision cascade statistics on pattern formation of ion-sputtered surfaces
dc.typeresearch article*
dc.type.reviewPeerReviewed
dspace.entity.typePublication
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